MEMS Inertial Sensors-Accelerometers and Gyroscopes

 
  1. O. Degani, D.J. Seter, E. Socher, S. Kaldor and Y. Nemirovsky, Optimal Design and Noise Considerations of Micromachined Vibrating Rate Gyroscope with Modulated Integrative Differential Optical Sensing, 11th IEEE Journal of Microelectromechanical Systems (JMEMS), Vol. 7, No. 3, September 1998, pp. 329-338.
  2. Ofir Bochobza-Degani and Yael Nemirovsky, High-Resolution micromachined accelerometer with CMOS integrated optical sensing, IEEE Sensor Letters, Vol1(1), pp.16-19, 2003.
  3. Y. Nemirovsky, P. Muralt and N. Setter, Design of a Novel Thin Film Piezoelectric Accelerometer, 1Sensors and Actuators, A56, pp. 239-249, (1996).
  4. O. Degani, D.J. Seter, E. Socher, S. Kaldor and Y. Nemirovsky, Micromachined Accelerometer with Modulated Integrative Differential Optical Sensing, IEEE Electronics Letters, Vol. 34, No. 7, 2nd April 1998, pp. 654-655.
  5. D.J. Seter, O. Degani, E. Socher, S. Kaldor, E. Scher and Y.Nemirovsky, Charcterization of a Novel Micromachined Optical Vibrating Rate-Gyroscope, AIP – Review of Scientific Instruments, Vol. 70, No. 2, February 1999, pp. 1274-1276.
  6. O. Degani, D.J. Seter, E. Socher and Y. Nemirovsky, A Novel Micromachined Vibrating Rate-Gyroscope with Optical Sensing and Electrostatic Actuation, Sensors and Actuators A: Physical, Vol. 83 (2000), pp. 54-60.
  7. O. Degani, D.J. Seter, E. Socher and Y. Nemirovsky, Comparative Study of Novel Micromachined Accelerometers Employing MIDOS, Sensors and Actuators A: Physical, Vol. 80, 2000 pp. 91-99.
  8. O. Bochobza-Degani, D.J. Seter, E. Socher and Y. Nemirovsky, Design and Noise Consideration of an Accelerometer Employing Modulated Integrative Differential Optical Sensing, Sensors and Actuators A: Physical, Vol. 84 (2000), pp. 53-64.
  9. D. J. Seter, O. Degani, S. Kaldor, E. Scher, J. Rosenberg and Y.Nemirovsky, Microelectromechanical Vibrating Inertial Sensors with Integrated Optical Sensing, Proceeding of GYRO-Technology Symposium, Stuttgart, Germany, 15-6 September 1998, pp. 10.0- 10.13.
  10. D.J. Seter, O. Degani, S. Kaldor, E. Scher, J. Rosenberg and Y. Nemirovsky, Microelectromechanical Vibrating Inertial Sensors with Integrated Optical Sensing, Proceedings of Gyro-Technology Symposium, Stuttgart, Germany, 15-16 September, 1998, pp. 10- 0 – - 10.13.
  11. O. Degani, D.J. Seter, E. Socher, S. Kaldor, E. Scher and Y. Nemirovsky, Comperative Study of Novel Accelerometers Employing MIDOS, Proc. of IEEE-MEMS'99, Orlando, USA, 17-21 January 1998, pp. 66-71.
  12. O. Bochobza-Degani, D.J. Seter, E. Socher and Y. Nemirovsky, Novel Dual-Axial SOI Micromachined Inertial Sensors with optical Sensing: Design and Fabrication, The 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, Tel-Aviv, Israel, April 11-12, 2000.
  13. D. J. Seter, O. Degani, S. Kaldor, E. Scher, J. Rosenberg and Y.Nemirovsky, Microelectromechanical Vibrating Inertial Sensors with Integrated Optical Sensing, Proceeding of GYRO-Technology Symposium, Stuttgart, Germany, 15-6 September 1998, pp. 10.0- 10.13.
  14. O. Bochobza-Degani, D. J. Seter, E. Socher and Y. Nemirovsky, From a single to multi-axial, decoupled mode micromachined inertial sensors with MIDOS, electrostatic actuators with a single degree of freedom, AISEM'2000, Lecce, Italy, February 12-15, 2000, pp. 181-182.
  15. O. Bochobza-Degani, E. Socher and Y. Nemirovsky, On the design and fabrication of novel micromachined inertial sensors employing enhanced modulated integrative differential optical sensing, IEEE/LEOS Optical MEMS 2001, Okinawa, Japan, 25-28 September 2001, pp. 53-54.
  16. O. Bochobza-Degani, R. Yechieli, E. Socher, U. Ben-Yehuda and Y. Nemirovsky, Characterization of a Novel Micromachined Accelerometer with Enhanced-MIDOS, International Conf. Solid-State Sensors and Actuators (Transducers'03), Boston USA, June 2003.
  17. Ofir Bochobza-Degani, Rafi Yechieli, Sharon Bar-Lev, Uri Ben Yehuda[ and Yael Nemirovsky, Characterization of a Novel Micromachined Accelerometer with Enhanced-MIDOS, IsraMEMS 2003, Tel Aviv University.
  18. O. Degani, D. Setter, E. Socher, S. Kaldor, E. Scher and Y. Nemirovsky, Comparative Study of Novel Micromachined Accelerometers Employing MIDOS, Proc. IEEE-MEMS'99, Orlando, FL, USA, 17-21 January (1999), pp. 66-71.
  19. O. Bochobza-Degani, D. J. Seter, E. Socher and Y. Nemirovsky, A Novel Micromachined Vibrating Rate Gyroscope with Optical Sensing and Electrostatic Actuation, Sensors and Actuators A: Physical, Vol. 83 (2000), pp. 54-60.