MEMS Thermal, IR and THz Sensors

 
  1. E. Socher, O. Degani and Y. Nemirovsky, Optimal Design and Noise Considerations of CMOS Compatible IR Thermoelectric Sensors, Sensors and Actuators A-Physical, Vol. 71, Nos. 1-2, pp. 107-115 (1998).
  2. A. Bell, Y. Huang, O. Paul, Y. Nemirovsky and N. Setter, A Thin Film Pyroelectric Detector, Integrated Ferroelectrics, Vol. 6, p. 231-240, (1995).
  3. E. Socher, O. Degani and Y. Nemirovsky, Optimal Performance of CMOS Compatible IR Thermoelectric Sensors, Journal of Microelectromechanical Systems, Vol. 9(1), (2000), pp. 38-46.
  4. E. Socher, O. Degani and Y. Nemirovsky, A Novel Spiral CMOS Compatible Micromachined Thermoelectric IR Microsensor, J. Michromech. Microeng, Vol. 11 (2001), pp. 574-576.
  5. E. Socher, S. M. Beer, Y. Nemirovsky, Temperature Coefficient of Current of CMOS SOI Transistors for sensing applications, IEEE Trans. On Electron Devices, IEEE Trans. On Electron Devices, 52(12), 2784-2790, 2005.
  6. A. Bell, Y. Huang, M. Daglish, O. Paul, Y. Nemirovsky and N. Setter, A Thin Film Pyroelectric Detector, I6th International Symposium on Integrated Ferroelectrics, March 1994.
  7. O. Degani, D.J. Seter, E. Socher, S. Kaldor, E. Scher and Y. Nemirovsky, Optically Sensed Cantilever Suspended Micromachined Inertial Sensor, Proc. of AGIL 98, Ramat-Gan, Israel, 25-26 November 1998, p. 40.
  8. E. Socher, O. Degani and Y. Nemirovsky, Integrated Uncooled Micromachined Fair-Infra-Red Thermoelectric Sensors for Thermal Imaging, Proc. of AGIL 98, Ramat-Gan, Israel, 25-26 November 1998, p. 78.
  9. E. Socher, O. Degani and Y. Nemirovsky, Investigation of Integrated Micromachined Uncooled Thermoelectric Sensors for Imaging Applications, Tech. Dig. International Conf. Solid-State Sensors and Actuators Transducers '99, Sendai, Japan, 7-10 June, 1999, pp. 406-409.
  10. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, Uncooled Micromachined CMOS Compatible IR Sensing Microsystems, 11th International Meeting on Electro-Optics in Israel, November 9-11, 1999, Tel-Aviv, Israel.
  11. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, Novel CMOS Compatible Frontside Micromachining of Integrated Thermoelectric Sensors, The 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, April 11-12, 2000, Tel-Aviv, Israel.
  12. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, Modeling and Characterization of CMOS Readout Circuits for Monolithic Uncooled IR Thermoelectric Sensors, The 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, April 11-12, 2000, Tel-Aviv, Israel.
  13. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, CMOS Compatible Integrated Thermoelectric Sensors using Novel Frontise Micromachining, Proc. AISEM2000, Lecce, Italy, 12-16 February 2000.
  14. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, Monolithic CMOS Readout for Micromachined IR Thermoelectric Sensors: Modeling and Characterization, Proc. AISEM2000, Lecce, Italy, 12-16 February 2000.
  15. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, Novel Uncooled Thermoelectric IR Sensors and Arrays in CMOS Compatible Technology, Proc. IEEE/LEOS International Conf. on Optical MEMS 2001, 25-28 Sept. 2001, Okinawa, Japan, pp. 117-118.
  16. E. Socher, Y. Sinai, O. Degani and Y. Nemirovsky, Modeling, Design and Characterization of Surface Micromachined Polysilicon Microbolometers, The 22nd IEEE Meeting, 1.12.2002, Tel-Aviv.
  17. E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky, Modeling Electro-Thermal Instabilities and Run-Away in Thermally Isolated Micromachined Distributed Structures, NanoTec 2003 (MSM'03), San Fransisco, February 23-27, 2003.
  18. E. Socher, Y. Sinai and Y. Nemirovsky, Low Cost CMOS Compatible bolometers for IR detection, International Conf. Solid-State Sensors and Actuators (Transducers'03), Boston USA, June 2003.
  19. E. Socher, L. Gitelman, Y. Sinai, A. Shay, Y. Nemirovsky, TMOS Novel Uncooled Sensors – Theory and Practice, IsraMEMS 2005, Technion, June 2005.
  20. S. Stolyarova, M. Weinstein, Y. Sinai and Y. Nemirovsky, AFM Study of CdS Films Grown by MOCVD, Scanning Probe Microscopy Israel-2005, Holon, June 16, p.18.
  21. S. Stolyarova, M. Weinstein, Y. Sinai and Y. Nemirovsky, CdxZn1-xS Films Growth on Microelectronic substrates, Proceedings of 11th European Workshop on MOVPE, Lausanne, June 5th-8th, 2005, pp.265-268.
  22. M. Weinstein, S. Stolyarova, Y.Sinai, A. Shai and Y. Nemirovsky, CdZnS Thin Film growth and its implementation at bolometric sensors, annual meeting of the Optical MEMS consortium, November 2005, Mosad Neeman, Technion.
  23. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, Modeling, Design and Fabrication of Uncooled IR CMOS Compatible Thermoelectronic Sensors, Proc. SPIE Conference Infrared Technology and Applications XXVIII, 7-11 July 2002, Seattle, USA.
  24. Y. Nemirovsky, A new micromachined uncooled IR sensor, The Conference on the Scientific Challenge at the Homesecurity and Antiterror War, Technion, December 2004.
  25. Y. Nemirovsky, Low cost bolometric imagers, Avnet consortium, Technion, March 2005.
  26. S. Stolyarova, M. Weinstein, Y. Sinai and Y. Nemirovsky, Growth and Annealing of Nanocrystalline CdxZn1-xS Films for Microelectronics, The 14th IVS Annual Conference&Technical Workshop, Ganei Taaruchah, Tel-Aviv, October 27, 2005.