Modeling of MEMS Actuators (Electrostatic, Magnetic)

 
  1. Y. Nemirovsky and O. Degani, A Methodology and Model for the Pull-In parameters of Electrostatic Actuators, JMEMS, Vol. 10, No. 4, December 2001, pp.601-615.
  2. Yael Nemirovsky, Ofir Degani, Gilaad Sarusi and I. Zelniker, A Methodology and Model for the Pull-In Parameters of Magnetostatic Actuators, IEEE JMEMS, ", IEEE JMEMS, 14(6), 1253-1264, 2005.
  3. O. Degani, E. Socher, A. Lipson, T. Lietner, D. J. Setter, S. Kaldor and Y. Nemirovsky, Pull-in Study of an Electrostatic Torsion Micro-Actuator, IEEE – Journal of Microelectromechanical Systems (JMEMS), Vol. 7, No. 4, December 1998, pp. 373-379.
  4. O. Degani and Y. Nemirovsky, Design Considerations of Rectangular Electrostatic Torsion Actuators with Rectangular Plates based on Analytical Pull-In Expressions, JMEMS, Vol. 11, No. 1, February 2002, pp. 20-26.
  5. O. Bochobza-Degani, E. Socher and Y. Nemirovsky, On the Effect of Residual Charges on the Pull-In Parameters of Electrostatic Actuators, Sensors and Actuators A: Physical, Vol. 97-98, 2002.
  6. O. Degani and Y. Nemirovsky, Modeling the Pull-In Parameters of Electrostatic Actuators with a Novel Lumped Two Degrees of Freedom Pull-In Model, Sensors and Actuators A: Physical, Vol. 97-98, 2002, pp. 569-578.
  7. O. Bochobza-Degani, D. Elata and Y. Nemirovsky, An Efficient DIPIE Algorithm for CAD of Electrostatically Actuated MEMS devices, J. MEMS, Vol. 11(5), (2002) pp. 612-620.
  8. O. Bochobza-Degani, D. Elata and Y. Nemirovsky, A General Relation between the Ranges of Stability of Electrostatic Actuators under Charge or Voltage Control, Appl. Phys. Letters, 82(2), pp. 302-304, 13 January, 2003.
  9. D. Elata, Ofir Bochobza-Degani and Yael Nemirovsky, Analytical approach and numerical a-lines method for Pull-In hyper surface extraction of electrostatic actuators with multiple uncoupled voltage sources, JMEMS, Vol 12(5), pp.681-691, 2003.
  10. Ofir Bochobza-Degani and Yael Nemirovsky, Experimental Verification of a Design Methodology for Torsion Actuators based on a Rapid Pull-In Solver, JMEMS, Vol.13(1), pp.121-130, 2004.
  11. Yael Nemirovsky, Ofir Degani, Gilaad Sarusi and I. Zelniker, A Methodology and Model for the Pull-In Parameters of Magnetostatic Actuators, IEEE JMEMS, ", IEEE JMEMS, 14(6), 1253-1264, 2005.
  12. O. Bochobza-Degani, D.J. Seter, E. Socher and Y. Nemirovsky, A Generalized Algebraic Equation for the Pull-In Condition in Micromachined Electrostatic Micromirrors: Modeling and Characterization, The 21st IEEE Convention of the Electrical and Electronic Engineers in Israel, April 11-12, 2000, Tel-Aviv, Israel.
  13. O. Bochobza-Degani, D. J. Seter, E. Socher and Y. Nemirovsky, A generalized Pull-In condition in micromachined electrostatic actuators with a single degree of freedom, AISEM'2000, Lecce, Italy, February 12-15, 2000, pp. 53-54.
  14. O. Degani, D. Elata and Y. Nemirovsky, A novel fully automated, rapid Pull-In parameters extraction scheme for optical MEMS devices, IEEE/LEOS Optical MEMS 2001, Okinawa, Japan, 25-28 September 2001, pp. 61-62.
  15. O. Degani, Y. Yaniv, W. Bishara and Y. Nemirovsky, Modeling the Pull-In parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model", Tech. Dig. International Conf. Solid-State Sensors and Actuators (Transducers'01), Munich, Germany, 10-14 June 2001, pp. 288-291.
  16. O. Degani and Y. Nemirovsky, On the effect of residual charges on the pull-in parameters of electrostatic actuators, Transducers'01/ EurosensorsXV Conf., Munich, June, 2001, pp. 292-295.
  17. O. Bochobza-Degani, D. Elata and Y. Nemirovsky, An Efficient Relaxation based DIPIE Algorithm for Computer Aided Design of Electrostatic Actuators, IEEE MEMS'2002 Conference, Las-Vegas, USA, 20-24 January, 2002, pp. 200-203.
  18. D. Elata, O. Bochobza-Degani and Y. Nemirovsky, An Efficient Numerical Algorithm for Extracting the Pull-In Hyper-Surfaces of Electrostatic Actuators with Multiple Uncoupled Electrodes, MSM'2002, April 21-25, 2002, San Juan, Puerto-Rico, USA.
  19. Bochobza-Degani, O., Feldman, S, Nemirovsky, Y, Comparative study of electrostatically actuated torsion micromirrors: design parameters and performance, Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference, 20-23 Aug. 2002.
  20. O. Bochobza-Degani, D. Elata, S. Feldman and Y. Nemirovsky, Secondary DOF and Their Effect on the Instability of Electrostatic MEMS Devices, MEMS'2003, Kyoto, Japan, January 19-23, 2003.
  21. D. Elata, O. Degani and Y.Nemirovsly, An Efficient Adaptive Single-Mode (ASM) Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices, NanoTec 2003 (MSM'03), San Fransisco, 23-27 Feb. 2003.
  22. O. Bochobza-Degani, D. Elata and Y. Nemirovsky, Stability of Charge-Controlled Electrostatic Actuators: A General Theorem and A Novel Charge Pull-In Extraction Numerical Scheme, NanoTec 2003 (MSM'03), San Fransisco, 23-27 Feb. 2003.
  23. O. Bochobza-Degani, D. Elata and Y. Nemirovsky, Alpha-Line Method for Measuring the Stability Domain and Pull-In Hyper-Surface of Electrostatic Actuators with Multiple Voltage Sources, International Conf. Solid-State Sensors and Actuators (Transducers'03), Boston USA, June 2003.
  24. Yael Nemirovsky and Ofir Bochobza-Degani, Modeling aspects of MOEMS: from system level aspects to physical aspects, Forum on Specifications and Design Languages, September 23-26, 2003, Frankfurt, Germany.